From Gary Zimmerman, ca. 11/98:

RESOLUTION OF ATI TILT SENSORS

The response of the dielectric tilt sensors is not linear over the
full range of the sensors.  The previous versions of sonic anemometers
employed an anti-log amplifier to compensate.  The new design of sonic
was designed with much smaller and less power consumptive electronics
and this feature was eliminiated.  The response of the sensors in the
range of +/- three degrees of level is sufficiently flat and accurate
enough to be used.  The range from three to five degrees is not.

The resolution of the co-ordinate translated outputs is: 1 LSB = 0.025
degrees.  This resolution remains true for the range of +/- 3 degrees.
The output for angles greater than three degrees will increase
exponentially from a reading of 0120 (bipolar output), to 2048 for a
full scale reading.  The angle needed for a full scale output will
vary from 4.5 to 5 degrees.  The intent of the tilt sensors was to aid
in the installation of the sonic probe and to check that the mounting
doesn't change.  Post processing to compensate for non-level installations
could be accomplished as long as the offset was less than 3 degrees.

We have not studied the response time of these sensors to determine if
they are adequate to process angles on a moving platform.  If you have
an application for this, contact us and we will try to determine if
this is possible.